Towards a nanostructured thermoelectric generator using ion-track lithography
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چکیده
منابع مشابه
Towards a nanostructured thermoelectric generator using ion-track lithography
This paper presents the process development towards a new generation of nanostructured thermoelectric generators for power harvesting from small temperature gradients by using a combination of traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography. Polyimide nanotemplates with pore diameters ranging from 30 nm to 120 nm were fabricated. Prelimina...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2008
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/18/10/104015